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nsf engineering research center for extreme ultraviolet science technology engineering research center for extreme ultraviolet euv science and technology home research people photos education industry news calendar students only contact us safety tests research experience for undergraduate students 2022 research projects offered at colorado state university university of california at berkeley application form welcome to the center for extreme ultraviolet science and technology an engineering research center erc exploring the development of compact coherent extreme ultraviolet euv sources and their applications in challenging scientific and technological problems light in the extreme ultraviolet region of the electromagnetic spectrum covers the 5 50 nm range because its wavelength is 100 10 times shorter than visible light it can see and write smaller patterns in applications such as microscopy and lithography furthermore these wavelengths are well matched to the primary atomic resonances of most elements making possible many element and chemically specific spectroscopies and spectromicroscopies our goal is to make euv light now mostly limited to a handful of large national facilities available routinely in a broad variety of laboratory settings for applications such as high resolution imaging spectroscopy elemental and bio microscopy and nano fabrication this picture shows all the different applications the euv erc has demonstrated in the last 3 years by combining unique coherent euv sources with state of the art euv optics through these efforts the euv erc is educating a diverse group of students and young scientists in euv optical technologies who will then go on to play a critical role in maintaining u s technological competitiveness the center for extreme ultraviolet science and technology created by the national science foundation in 2003 among four core partner institutions colorado state university university of colorado at boulder university of california at berkeley lawrence berkeley national laboratory other center outreach partners in research and education include spelman college morehouse college agnes scott college csu pueblo the university of the south sewanee brywn mawr brigham young university hamline university uc davis massachusetts institute of technology university of buenos aires sofia university the pueblo school of arts and sciences lebedev physical institute lawrence livermore national laboratory drexel university kth university of stockhom and state university of new york at albany the center also has an industry outreach program 2014 colorado state university the foundation for the euv erc was provided by the engineering research centers program of the national science foundation under nsf award number eec 0310717 any opinions findings and conclusions or recommendations expressed in this material are those of the author s and do not reflect those of the national science foundation last updated 11 16 21